Electronic Special Gases: An Overview
Electronic special gases are a crucial branch of special gases. They play a vital role in semiconductor production. These gases are essential for manufacturing large-scale integrated circuits, flat panel displays, and solar cells.
Fluorine-Containing Gases in the Semiconductor Industry
Fluorine-containing gases are widely used in semiconductor processes. They account for about 30% of the global electronic gas market. These gases serve as cleaning agents, etchants, dopants, and film-forming materials.
Commonly Used Fluorine-Containing Gases
- Nitrogen Trifluoride (NF3): Used for cleaning reaction chambers and equipment surfaces.
- Sulfur Hexafluoride (SF6): Acts as a fluorinating agent and insulating gas.
- Hydrogen Fluoride (HF): Removes oxides and etches silicon and other materials.
- Nitrogen Fluoride (NF): Etches materials like silicon nitride and aluminum nitride.
- Trifluoromethane (CHF3) and Tetrafluoromethane (CF4): Etch fluoride materials such as silicon fluoride.
Hazards of Fluorine-Containing Gases
- Toxicity: Gases like hydrogen fluoride (HF) are harmful to human health.
- Corrosivity: HF and some fluorides can damage skin, eyes, and the respiratory tract.
- Combustibility: Some fluorides are flammable and may cause fires or explosions.
- High-Pressure Danger: Certain fluorinated gases pose explosion risks under high pressure.
- Environmental Impact: These gases have high GWP values and harm the ozone layer.
Growth Prospects of the Electronic Gas Industry
The demand for industrial gases is rising in emerging fields like electronics. China’s growing semiconductor and display panel production will drive this growth. The domestic electronic gas industry is poised for significant expansion.
